Programmable Wafer Heated Chuck
Large circular milled flat aluminum surface, with temperature uniformity across the entire heating surface better than 1%. Designed
for processing silicon wafers with a diameter of 12 inches (304.8 mm) or smaller, as well as other samples requiring temperature
accuracy and surface uniformity.
for processing silicon wafers with a diameter of 12 inches (304.8 mm) or smaller, as well as other samples requiring temperature
accuracy and surface uniformity.
Features
• Heater surface diameter: 13.875 inches (354.24 mm)
• Milled flat aluminum is ideal for silicon wafers of 12 inches (304.8 mm) or smaller
• Remote control from a PC or industrial controller via RS232 I/O port or remote controller, providing full access to all parameters and data
• Benchtop control and programming using the supplied remote controller
• Temperature range: ambient to 350°C
• Readable and settable to 1 °C
• Setpoint accuracy: 1%
• Temperature uniformity better than 1% within 0.75‑inch range from the center to the edge of the plate surface
• Temperature stability: ±1℃
• Calibrated to 0.1 °C to ensure accuracy
• The remote controller can store 5 separate programs with up to 10 steps each for various unattended, repeatable sample runs
• Programs can automatically repeat 1 to 99 times, or repeat indefinitely as required
• Temperature ramp up or down from 1 °C to 450 °C in increments of 1 °C/hour
• 1500 W heater power
• Unique temperature indicator light ring at the bottom of the chassis. The color changes from blue (no target temperature) to yellow (heating below
50 °C) and then to red (heating above 50 °C). The indicator light flashes until the temperature stabilizes within ±0.2 °C
50 °C) and then to red (heating above 50 °C). The indicator light flashes until the temperature stabilizes within ±0.2 °C
• Built‑in countdown timer with audible alarm and configurable auto‑shutoff function
• 12‑month warranty
• Pending UL, CSA and CE approval
Application Fields
• Silicon wafer cleaning
• Silicon wafer drying
• Silicon wafer etching
• Thermal testing of circuits
• Heat resistance test for epoxy resin
• Soldering surface‑mount PCBs
• Life‑cycle testing of PCBs
• Testing liquid crystal displays
Complete product specifications
Complete product specifications
| temperature | |
| Platinum thermal resistance | Zero‑point 100 Ω is mounted on the top of the heater |
| range | Plate surface 10°C to 350°C |
| readability | 1℃ |
| temperature‑controlled | PID |
| Temperature stability | 1℃ |
| Temperature uniformity | Settings within 0.75 inches from the center to the board edge are better than 1% |
| electrical | |
| Heater Power | 1500W |
| Alternating current | 115 VAC, 50/60 Hz (230 VAC available upon request) |
| fuse | Yes |
| power cord | Detachable, 6 ft (1.8 m), 3‑wire grounding. Single‑phase |
| Size: Heater Module | |
| width | 13.875‑inch (352.4 mm) circle |
| height | 5.75 inches (146 mm) |
| weight | 21.5 pounds (9.54 kilograms) |
customer service1 