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Vacuum heating plate + water‑cooled plate
Vacuum heater
Our customized multi‑function series delivers comprehensive services, providing you with the tools required for any application.
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Overview of Vacuum Heaters
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In Fullchance, we provide cost‑effective, high‑uniformity wafer heaters,
vacuum heaters and sample heaters for research and industrial applications in thin‑film deposition and sample processing. Our sample heaters can be equipped with holders or clamps to secure a range of semiconductor wafers or samples.
All heaters undergo comprehensive testing. Our in‑house testing
capabilities include helium leak checks, full‑temperature testing using vacuum test systems, and uniformity testing with FLIR thermal imagers. St. Berlin is ISO 9001 certified. |
The Fullchance design team works closely with clients to provide:
• Professionally managed projects from start to finish
• Cost‑effective solutions that utilise standard Fullchance components wherever possible
• Detailed technical drawings and written specifications
• 3D CAD models
• Fully tested heating solutions that can be integrated with your systems
• Manuals detailing installation and operating instructions
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Chuck substrate vacuum heater
Features
• Standard direct‑contact sample heaters accommodate sample sizes with hot zones from 1 inch (25.4 mm) to 6 inches (152.4 mm). Larger sizes are
available via special design
available via special design
• Lamp heaters for radiant heating applications
• Configurations available for high vacuum, ultra‑high vacuum, oxygen, air and corrosive environments
• Standard element materials: Inconel, nickel‑chromium (NiCr), carbon‑carbon composite (CCC), pure silicon carbide (SiC₃) CVD‑coated graphite, and
tungsten
tungsten
• Standard temperatures up to 1600°C (higher temperatures achievable upon request)
• Fast ramp‑up and high efficiency
• Equipped with appropriate internal thermocouples for measuring and controlling temperature
• Free‑standing, stud‑mounted or flange‑mounted
• Essential building blocks for complete systems
• Excellent uniformity across the sample heating area (<±2%). Ultra‑high uniformity range (<±1%)
• Water‑cooling option to minimize chamber thermal load
• Larger sizes and alternative shapes available upon request
• Fully customizable with complete bespoke solutions
• Stages can be fitted where rotation, Z‑axis movement, and RF or DC biasing are required
• Includes vacuum‑side and atmosphere‑side cable assemblies
• Manufactured and tested in the United Kingdom
Committed to Quality
All heaters are fully tested. Our in‑house testing capabilities include helium leak inspection, full‑temperature testing with vacuum test systems, and uniformity
testing using FLIR thermal imagers. Fullchance is ISO 9001:2015 registered.
testing using FLIR thermal imagers. Fullchance is ISO 9001:2015 registered.
Sample Heating Stages
Fullchance offers a full range of sample heating stages for all thin‑film deposition system applications. Heaters and samples can be mounted in any orientation,
and the Fullchance series manipulators provide cost‑effective options for sample rotation, heater rotation, sample transfer, and sample/heater positioning.
and the Fullchance series manipulators provide cost‑effective options for sample rotation, heater rotation, sample transfer, and sample/heater positioning.
Sample heating stages support sample biasing (RF or DC) up to 1000 W, and are equipped with temperature controllers and power supplies. Full shielding and
power/thermocouple line filtering are available for heaters and platforms with RF biasing. Water‑cooled heaters can be fitted with chillers.
power/thermocouple line filtering are available for heaters and platforms with RF biasing. Water‑cooled heaters can be fitted with chillers.
Customization
Fullchance provides custom‑built solutions for heating applications that cannot be achieved using standard heaters and platforms. The Fullchance design team
works closely with customers to deliver:
works closely with customers to deliver:
• Professionally managed projects
• Cost‑effective solutions that utilise standard Fullchance components wherever possible
• Detailed technical drawings and written specifications
• 3D CAD models (if required)
• Fully tested heating solutions ready for integration with your system
Manuals containing detailed installation, specification and operating instructions
Temperature Controller
Using a temperature controller, substrate heating can be customized according to specification requirements to prepare thin films for chemical vapor deposition
systems.
systems.
customer service1 