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The key feature of the latest Fullchance 450 mm vacuum heater chuck is its suitability for atomic layer deposition (ALD) applications up to 450 °C. This design is a compact assembly with numerous vacuum holes and grooves in the baseplate to allow gas to escape during vacuum chamber pumping. Surface anodization is not required.
This high‑efficiency vacuum heater reaches an atmospheric temperature of 450 °C within 45 minutes (700 °C for stainless steel). Reduced mass in the baseplate enables adequate gas removal and a faster initial heat‑up time. Given the shortened heat‑up duration, reduced wattage may be an option for future iterations of the 450 mm vacuum heater chuck.
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Specifications
• Plate body: Aluminum 6061
• Seal assembly: Stainless steel
• Electric heating element: 3,850 W (+/- 10%) / 240 V
• Maximum temperature: 450°C under vacuum
• Heater sheath transition and compression components: Stainless steel 304
• Flanged compression sleeve brazed at two positions
• 16ra, surface finish, no anodization
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