Regarding US | Contact us Welcome toFullchance Industrail Co.,Limited website!
Focused on the production of electric heating products
Contact us:+86 755-27749405
Position: Home > Semiconductor Wafer Heater > Vacuum heating plate 350MM

Contact Us

Fullchance Industrail Co.,Limited
Address:B1 building ,An'feng Industrial zone,Dalang street,longhua district ,shenzhen china 518109
Email:fullchance1@fullchance.cn
Tel:+86 755-27749405
Mobile Phone:13929756916

Vacuum heating plate 350MM
Seek solutions within a vacuum chamber for testing and processing silicon and glass assemblies at approximately 650°C. The heater
surface measures 350 mm × 300 mm × 12.7 mm thick, is flat, and features no lift‑pin holes or gates to secure the product in position.
The long cold pin section extending from the heater centre to the flange must be sufficiently long for venting to atmosphere. A baseplate
with a slotted design is welded to hold the heat source in place and improve heater efficiency.
Specifications
• Temperature: 650℃‑700℃
• 18‑inch long cold finger section with CF vacuum flange at the bottom
• Helium leak rate: 1 x 10⁻⁹ cc/sec He across the CF flange only
• 300mm x 350mm x 12.7mm thick, suitable for silicon and glass products
• Built‑in thermocouple for over‑temperature protection or control
• 2,400 watts (±10%), 240 volts
• Mounting threads on the bottom of the assembly
• Material: 304 stainless steel

Results
The vacuum heater platen was heated up to 650°C at 75% power (1800 watts) in atmosphere with a ceramic‑fiber insulation cover. After one hour of heating, the heater reached 650°C and was then turned off for cooling. Discoloration occurred on the top surface, which was expected in atmosphere at this temperature. Re‑check the electrical specifications, then clean, pack the heater for delivery.
Online Service
Contact us

Hotline Phone

+86 755-27749405

Service Time

Monday to Saturday

Company Tel

13929756916

QR code
ONLINE