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ESC (Electrostatic Chuck)
ESC is a core component of the Etcher equipment, which is semiconductor etching process equipment. We possess the experience and technical capability to co‑develop with major semiconductor equipment companies and realize the localization of ESC.
Leveraging our proprietary manufacturing technologies for MLC and hot presses, we develop, manufacture and supply ESC to meet diverse customer requirements.
* A consumable component connected to the chamber of etching equipment used in the etching step of semiconductor manufacturing processes. It holds and secures wafers with constant power.
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1. Multi‑Layer Ceramic (MLC) Electrical Tuning
Fullchance high‑performance ESC is manufactured based on an optimized inline MLC process.
MLC ESC is a critical component used in numerous semiconductor equipment and processes.
ESC designs, such as electrode and coolant patterns, deliver a wide range of functional performances.
Fullchance MLC ESC provides optimal wafer temperature control through built‑in multi‑layer electrodes and multi‑zone heaters.
2. High‑Performance Hot‑Press (HP) Electronic Tuning
2. High‑Performance Hot‑Press (HP) Electronic Tuning
Fullchance ceramic hot‑press electronic tuning features high‑end ceramic properties
High‑purity ESC delivers high dielectric strength and relative density
High‑dielectric‑constant ESC generates high clamping force
Heaters or multi‑electrodes can be embedded in ceramic plates
Fullchance HP ESC exhibits high durability in high‑density plasma etching processes
High‑purity ESC High‑dielectric‑constant electrical tuning
3. Ceramic Material Properties of Fullchance ESC
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High‑purity ESC High‑dielectric‑constant electrical tuning
3. Ceramic Material Properties of Fullchance ESC
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Grade
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Characteristic
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Density(g/cm³)
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Dielectric Constant
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Volume Resistivity(Ω·cm)
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Thermal Conductivity(W/(m·K))
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Vickers Hardness(HV)
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| MLA | multi‑layer electrode | ≥3.8 | 10 | ≥1E16 | 24 | ≥1350 |
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Process
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Details
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ESC Type
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Comments
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| Dry etching | oxide | monopole | high‑density ceramics, multi‑layer electrodes |
| bipolar | high‑density ceramic, embedded helium channels | ||
| Poly | monopole | multi‑zone heaters, embedded heaters | |
| bipolar | multi‑zone heater, multi‑layer electrode |
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